Technical Services

Refurbish of KLA-Tencor metrology equipment

Refurbishment of overlay, resistivity and macro metrology KLA-Tencor equipment. Refurbishment done under cleanroom mini environment in Singapore.

Preventive Maintaince and Corrective Maintainance Service

Support preventive maintainance and corrective maintainance for overlay, resistivity and macro defect KLA-Tencor measurement tools

Technical Support

Technical Support Services for overlay, resistivity and macro defect metrology KLA-Tencor equipment for difficult issues.

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Product Type

Overlay

1. 5200XP

2. 5300

3. Archer10/Archer10XT

4. Archer+

5. Archer 100

6. Archer 200

7. Archer 300

8. Archer 300+

1. 5200XP

2. 5300

3. Archer10/Archer10XT

4. Archer+

5. Archer 100

6. Archer 200

7. Archer 300

8. Archer 300+

Resistivity Models Types

1. RS35

2. RS55

3. RS75

4. RS100/RS100C

5. RS200

Macro Defect Review Types

1. Viper 2401

2. Viper 2410

3. Viper 2435

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